magnetron PECVD of a-C H films with acetylene precursor from PICMC simulations
Understanding the magnetron PECVD of a-C:H films with acetylene precursor from PICMC simulations -- Oral talk NISM meeting 20/09/2019 -- Antoine FAUROUX, Andreas PFLUG, Stéphane LUCAS
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magnetron PECVD of a-C H films with acetylene precursor from PICMC simulations
Understanding the magnetron PECVD of a-C:H films with acetylene precursor from PICMC simulations -- Oral talk NISM meeting 20/09/2019 -- Antoine FAUROUX, Andreas PFLUG, Stéphane LUCAS
